FAB Optima - University of California, Berkeley
SMC-SMD: Wafer - VPD ICP-MS SMC-SMM: Wafer - VPD ICP-MS & TXRF Pump/Adsorbent Fused Silica (8h sampling) Air Bubbler Witness Wafer AMC-MA: Anion - air sampler/IC AMC-MB: Amines/ammonia - air sampler/IC AMC-MD: Phosphate ions - air sampler/IC AMC-MD: B and P - air sampler/ICP -MS