Review* of Metallic Resists for EUV
Brainard and Brainard 12 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 50 40 30 20 m) Feature Size (nm) II. MORE: B. Low LER Tin Resists (Del Re) LER Does Not Follow Z Parameter Dose = 300 mJ/cm2 Theoretical LWR and LER Measured LWR and LER CD: 35 nm 35 nm LER: 1.4 nm 1.1 nm LWR: 1.9 nm 1.7 nm Del Re & Brainard JM3 2015 043506