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Product InformationSubstance WR4-SF Patinal GENERAL INFORMATIONSubstance WR4-SF Patinal was developed for the deposition of hydrophobic layers by evaporationin vacuum. Substance WR4-SF Patinal has the following advantages: In addition to its excellent hydrophobic properties, Substance WR4-SF Patinal is also oleophobicwhich eases the removal of e.g. fingerprints. Substance WR4-SF Patinal forms very durable and well adhering coatings on silica and silicateglass.The low reflection of an AR-coated surface increases the visibility of fingerprints and othercontaminations due to a larger contrast between clean and dirty surface areas. The excellenthydrophobic and oleophobic properties of Substance WR4-SF Patinal support protecting thesesurfaces from contaminations and maintaining their functionality. Additionally, a WR4-SF coated layeris easier to clean.Substance WR4-SF Patinal is delivered as tablets made from a metallic carrier doped with thehydrophobic substance.AREAS OF APPLICATION Hydrophobic & oleophobic topcoat for ophthalmic lenses Topcoat for camera lenses, binocular lenses & automotive cameras Topcoat for optical filters, spectroscopic windows & other sensitive optical componentsStatus: 02 / 2021, Page 1 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

THIN FILM PROPERTIESSubstance WR4-SFPatinal ltwaterAbrasion test(4000 cycles)Water116 30 116 112 112 105 Ethylene Glycol102 23 102 Hexadecane70 8 70 Typical (not guaranteed) contact angles for Substance WR4-SF Patinal The contact angle is measured with a Krüss DSA 100 or a Krüss Mobile Drop.The sliding angle is a good indicator for the smoothness of a coating. It is measured using a tiltingtable on a Krüss DSA 100. A 15 µl water droplet is applied to the coated surface, then the inclinationof the table is slowly increased to determine the angle at which the droplet starts to slide off.The boiling test was performed by immersion of the coated substrate in boiling hot water for a periodof 30 min. The contact angle was measured before and after the test.Acidic resistance was tested by immersion of the coated substrate in 5 wt% HCl (aq) solution for aperiod of 72 hours. The contact angle was measured before and after the test.The salt water test was performed by immersion of the coated substrate in a 4.6 wt% NaCl (aq)solution for 72 hours. The contact angle was measured before and after the test.Substance WR4-SF Patinal shows very high mechanical durability and resistance to wiping andabrasion. The stability of the coating is judged by comparing the water contact angle before and afteran abrasion test with steel wool.Test conditions: Cycles: up to 8000, 1 cycle 2 hubs of 50 mmHub length: 50 mmSpeed: 60 cycles/minLoad: 10 N/cm²Abrasion material: Steel wool #0000Status: 02 / 2021, Page 2 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

Abrasion resistance of Substance WR4-SF Patinal with steel woolNOTES FOR EVAPORATIONEvaporator sourceResistance heated thermal evaporatorElectron beam evaporator (indirect)Tablet holderFor resistive heating: Box type Ta or W boat (see fig. 2)For e-beam heating: Mo or Ta liner with perforated cover(see fig. 3)Temperature400 – 800 Crecommended 600 CChamber pressure 4·10-5 mbarSubstrate temperatureFrom RT up to 300 Crecommended RTQCR-settingsDensity 1.5 g/cm³, z-ratio 1.0Thickness (QCR)15 – 20 nm (depending on tooling factor)In general, we recommend the more moderate resistive source heating over e-beam heating. If ebeam heating is unavoidable, the e-beam ought not to be focused directly onto the tablet.Status: 02 / 2021, Page 3 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

Adhesion and DurabilityWR4-SF Patinal durable films with good adhesion can be obtained when deposited onto oxidicsurfaces, especially onto SiO2 or Substance L5 Patinal films.AR CoatingsA WR4-SF Patinal layer can be deposited right on top of the final SiO2 layer of an AR stack.It can also be directly deposited onto MgF2 layers with acceptable performance, but an intermediatelayer of a few nm SiO2 between MgF2 and WR4-SF Patinal is suggested for higher durability.Hydrophobic GlassIf WR4-SF Patinal is to be applied onto a glass surface it can either be deposited directly onto theclean surface (e.g. silicate glasses) or on top of a thin SiO2 adhesion promoting layer (recommended).Evaporation Process Steps1. Substrate cleaning2. WR4-SF Patinal tablet transfer to evacuation chamberPlace WR4-SF Patinal tablet (see figure 1) into evaporation chamber immediately afterunpacking from original package and start evacuation. For tablet handling please use tweezers.Fig. 1: Substance WR4-SF Patinal Fig. 2: Box type boatFig. 3: Liner with perforated cover3. Optional plasma cleaning for adhesion and durability improvement Process gas: Ar or Ar/O2 mixture (80% / 20%) Process time: 3 min4. Adhesion layer (if required) Material: SiO2 as preferred adhesion layer or Substance L5, Al2O3 etc. Deposition rate: 0.15 – 0.3 nm/s Thickness: 5 - 30 nm5. Substance WR4-SF Patinal Evaporation conditions as described above Process power: constant power (no rate control), low power setting depending on equipment Substrate temperature range: RT – 300 C, no substrate heating recommended Evaporation/boat temperature can be increased, but be aware that discoloration of WR4 tablet(rear side) indicates a too high boat temperature Chamber pressure: 4*10-5 mbarStatus: 02 / 2021, Page 4 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

6. Post deposition ripening Chemical ripening will be achieved during ambient storage, without acceleration Optional: Store in a warm and humid environment (e.g. 50 C @ 80% RH for 2 h) Optional: Curing in air for ca. 1 h at higher temperatures (up to 150 C)The evaporated substance forms a thin layer on the substrate. Optimum properties can be obtainedfor films of ca. 10-20 nm with full depletion of the tablet.The refractive index of Substance WR4-SF is about 1.3 in the visible spectral range. For optimumresults on AR-coatings, the final AR-Layer should be reduced in thickness to compensate for theadded Substance WR4-SF Patinal layer.In order to provide sufficient evaporation material it may be necessary to use more than one WR4SF Patinal tablet dependent on PVD chamber size. As a rule of thumb please refer to followingtable:PVD chamber diameter [mm]No. of tabletsRate [nm/s]Evaporation time [s]600-9501 tablet0.4210950-13002 tablets0.362331300-16003 tablets0.352741600-20004 tablets0.32328Status: 02 / 2021, Page 5 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

PRODUCTSSubstance WR4-SF Patinal is available as doped metallic tablets.Product CodeDescriptionDimensions1.01822.0023Substance WR4-SF Patinal TabletsØ 11 mm x h 7 mmStorage conditionsShelf life of Substance WR4-FS Patinal is max. 5 months for ambient conditions. Refer to the expirydate on the package. However, we recommend storage in a cool and dry place in the original sealedpackage ( 2 and 8 C).Allow for full accommodation to room temperature before opening the package in order to preventcondensation of humidity from the environment onto the tablet.Shipping conditionsSubstance WR4-SF Patinal in the original package can be shipped without special precautions ortemperature settings without detrimental effect on shelf life.SPECIFICATIONRoHS informationSizesThe RoHS compliance information is partof the Certificate of Analysis (CoA) foreach batch of Patinal material.1.01822.0023h 6.5 – 7.5 mmØ 10.5 – 11.5 mmApplication testContact angle 110 (water)Each batch has to pass a specific applicationtest assessing its evaporation behavior.Status: 02 / 2021, Page 6 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

Quality assuranceResearch, production and sales of our Patinal evaporation materials take place under a certified DINEN ISO 9001 quality management system and DIN EN ISO 14001 environmental managementsystem. The quality of the materials is assured by our manufacturing processes, in-process controlsand quality tests. Each batch is released only after passing our chemical analysis and applicationtests designed to confirm the suitability of the material for the evaporation process.Handling precautionsProduct safety information required for safe use is not included in this document. Before handling,read product and safety sheets and container labels for safe use, physical and health hazardinformation. The material safety data sheet is available online at www.patinal.com, from your EMDrepresentative or distributor, or by calling your global Merck KGaA, Darmstadt, Germany, contact.DisclaimerProducts are warranted to meet the specifications set forth on their label/packaging and/or certificateof analysis at the time of shipment or for the expressly stated duration. EMD MAKES NOREPRESENTATION OR WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDINGMERCHANTABILITY OR FITNESS FOR A PARTICULAR USE REGARDING OUR PRODUCTS OR ANYINFORMATION PROVIDED IN CONNECTION THEREWITH. Customer is responsible for and mustindependently determine suitability of EMD s products for customer’s products, intended use andprocesses, including the non-infringement of any third parties intellectual property rights. EMD shallnot in any event be liable for incidental, consequential, indirect, exemplary or special damages ofany kind resulting from any use or failure of the products: All sales are subject to EMD’s completeTerms and Conditions of Sale. Prices are subject to change without notice. EMD reserves the right todiscontinue products without prior notice.EMD, EMD Performance Materials, the vibrant M, Patinal are trademarks of Merck KGaA, Darmstadt,Germany.Status: 02 / 2021, Page 7 of 7EMD Performance Materials*1200 Intrepid Ave, Suite 300 / Philadelphia, PA / 19112 [email protected]/ patinal.com* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany

* EMD Performance Materials is a business of Merck KGaA, Darmstadt, Germany Quality assurance Research, production and sales of our Patinal evaporation materials take place under a certified DIN EN ISO 9001 quality management system and DIN EN IS